2018 IEEE International Electron Devices Meeting (IEDM 2018)
December 1-5, 2018, San Francisco, United States
The following presentation reported on results of SUPERAID7:
S. Barraud et al., Tunability of Parasitic Channel in Gate-All-Around Stacked Nanosheets
in: Session 21 (Tuesday, December 4, 2:15 pm, Continental Ballroom 5): Process and Manufacturing Technology - Advanced Gate All Around Process